MicroROBOTEX
µROBOTEX is a technological platform dedicated to characterising, handling and assembling micro- and nanosystems with dimensions smaller than 10µm.
Description
Located at SUPMICROTECH-ENSMM in Besançon, the µROBOTEX platform has been operational since 2014 and is managed by the FEMTO-ST Institute’s AS2M department.
The platform hosts a variety of optical and electronic microscopy devices, 6-axis microrobots, laser interferometers and micro- and nanoforce sensors. In particular, μROBOTEX has a SEM (scanning electron microscope) equipped with a FIB column (etching), a gas injection system (CVD deposition) and micromanipulators in the chamber totalling 15 axes.
The goal with μROBOTEX is to offer researchers working on micro- and nanotechnologies scientific instruments of an international level. Associating a knowledge of microsystems, physical and chemical phenomena on the nanometric scale, robotics and automation, the μROBOTEX platform offers a unique environment for automating micro-assembly operations and characterising micro- and nanosystems.
Access to the platform is open to academics and industrial partners for their developments and research projects.
This platform is funded in the framework of the PIA Investments for Future Programme and by Bourgogne Franche-Comté region. μROBOTEX is part of the ROBOTEX French national network of robotic experimental platforms and is an “EquipEx facility of excellence” (ANR-10-EQPX-44-01).
The MicroROBOTEX project
Duration:
2011 - 2019
Partners
Research laboratories:
ETIS, FEMTO-ST, GIPSA-Lab, Heudiasyc, IRCCyN, INRIA-Rennes, ISIR, ISM, I3S, LAAS, Institut Pascal, LIRMM, ICube, Pprime, TIMC-IMAG
Companies:
KOELIS, GE Healthcare, Surgical Perspective, EndoControl, PARROT, CRITT Matériaux Alsace, MAGELLIUM, NOVADEM, ECA, PSA Peugeot Citroën, DASSAULT Aviation, BA Systems, Pégase, ViaMéca, Alcan, ADIV, Rb3d, Aldebaran Robotics, KINEO, BOUYGUES Travaux Publics, GOSTAI, MOVEA, DAHER Aerospace, PERCIPIO Robotics, Smart Equipment Technology, Robosoft, APOJEE, TECNALIA, THALES, Pôle des Microtechniques de Besançon, Centre de Plasturgie Grand Est, CERAM,
ContactS
Coordinator
Guillaume LAURENT
guillaume.laurent [at] ens2m.fr
Management team
Joël ABADIE,
Joël AGNUS,
Sounkalo DEMBÉLÉ,
Olivier LEHMANN,
Jean-Yves RAUCH,
Patrick ROUGEOT